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Title: 低温沉积SiO2薄膜工艺研究
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Page number: 168-171
Issue: 3
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PubYear: 2013
Volume: 19
Unit code: 154232
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Copyright 2003 - 2005 All Rights Reserved Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Southeast Road 3888 Changchun Jilin Email：ciomp@ciomp.ac.cn